header
<< Back

PL Series

EZImprinting introduces a bench-top, stand-alone nanoimprint platform: The PL series PL200/400/600.

This platform provides a mechanical stage with micro-positioning fixtures for mounting a nanoimprint chamber, UV-curing source, and alignment microscope.

It functions both as a nanoimprint system and as a traditional mask aligner while providing programmable, automatic control of your entire imprinting process.

EZImprinting Advantages

  • Sub-10nm resolution with 99% yield
  • Supports both hard and soft molds
  • Variable mold and substrate sizes offer unparalleled convenience and flexibility
  • Auto-Release process prevents mold/substrate damage during separation and maximizes yield per imprint
  • Auto-Release process prevents mold/substrate damage during separation and maximizes yield per imprint
  • Versatile processes for a wide variety of applications:
  • optical devices, displays, data storage, biomedical
  • devices, semiconductor IC's, chemical synthesis, and advanced materials
  • Programmable PLC with touch-screen user interface allows process control through customized parameters
  • Proprietary UV-curable nanoimprint resist has no limitations on hardness or thickness, and is compatible with traditional photolithography processes

    •
    PL400 with alignment microscope

     

     

    PL400 with UV LED source

     

    EZImprinting Process Specifications
      PL200 PL400 PL600
    Substrate size 2" standard (smaller sizes, irregular shapes compatible) 4" standard (smaller sizes, irregular shapes compatible) 6" standard (smaller sizes, irregular shapes compatible)
    Imprint area Same as wafer size Same as wafer size Same as wafer size
    Mold plate size 2" and 1" 4", 2" and 1" 6", 4", 2" and 1"
    Imprint pressure 1 psi standard
    Mold/substrate Auto-Release Included- no special tools needed
    UV exposure time 2-3 min at 95% intensity level
    Alignment capability X, Y, Z and theta (accuracy 2 μm)

    Technical Specifications
    Control box operating pressure 45 psi standard
    Control box vacuum < -14 psi
    LED light source 2" diameter, >5W
       
    Filtered pressure source 70-100 psi
    Vacuum source < -14 psi
    Power 110-220V, 50/60Hz
    Classroom class Class 1000 or better
       
    Stage 17" x 15.5" x 10.5", 80 lbs.
    Touchscreen controller 6" x 8" x 2.5", 1.5 lbs.
    Electronic control box 17" x 14.5" x 5.5", 11.5 lbs.
    LED UV light source 11" x 11" x 4.5", 7 lbs.