Our Fusion Mold combines a soft, flexible substrate with a rigid top layer. This provides both maximized production yield (>99%) and high resolution nanopatterns (sub-10 nm).
A unique buffer layer between the soft substrate and rigid top layer is formed by fusing the dissimilar materials together. By fusing in a gradient manner, the buffer layer effectively alleviates stress defects common in other hybrid molds. The result is enhanced, defect-free bonding of the two materials. The Fusion Mold has a lifetime comparable to the Quick Mold.
Standard grating mold dimensions
|Grating ID:||Pitch (period)||Line width||Depth||Active area|
|G1394||578nm||200nm||104nm||20mm x 40mm|
|G1304||340nm||140nm||108nm||15mm x 30mm|
|G1317||568nm||261nm||78nm||15mm x 30mm|
|G1322||580nm||228nm||73nm||15mm x 30mm|