Soft/flexible substrate hybrid mold – Fusion Mold
Our Fusion Mold combines a soft, flexible substrate with a rigid top layer. This provides both maximized production yield (>99%) and high resolution nanopatterns (sub-10 nm).
A unique buffer layer between the soft substrate and rigid top layer is formed by fusing the dissimilar materials together. By fusing in a gradient manner, the buffer layer effectively alleviates stress defects common in other hybrid molds. The result is enhanced, defect-free bonding of the two materials. The Fusion Mold has a lifetime comparable to the Quick Mold.
Standard grating mold dimensions
Grating ID: | Pitch (period) | Line width | Depth | Active area |
---|---|---|---|---|
G1394 | 578nm | 200nm | 104nm | 20mm x 40mm |
G1304 | 340nm | 140nm | 108nm | 15mm x 30mm |
G1317 | 568nm | 261nm | 78nm | 15mm x 30mm |
G1322 | 580nm | 228nm | 73nm | 15mm x 30mm |